Applications
- Plasma etch electrostatic chuck monitoring
- Plasma shower monitor inside the chamber
- Temperature monitoring outside the chamber
- Wafer fab equipment temperature monitoring
- Semiconductor and FPD processing using RF and plasma.
Luxtron® m920 OEM Series Key Benefits and Features
- Achieve high accuracy and a high temperature range for different etching and wafer fab processes.
- Monitor faster ramp conditions with a fast sample rate.
- Gain better temperature measurements with this low-noise solution.
- Take advantage of high reliability for low failure rates.
- Supports custom integration and probe designs worldwide
- Two or four channels, expandable up to 64 with RS485 Modbus
- Single PCB design with options for analog output and metal enclosure
- Mix and match components
- Works with semiconductor Luxtron® brand Fluoroptic probes and fiber optic extensions
- Built-in calibration tables match to custom Advanced Energy probes for high accuracy measurements (accuracy of up to ±0.05⁰C is achievable probe dependent)
- Probes are immune to electromagnetic interference, such as high voltage, RF, plasma and microwave.
- Backward compatible Advanced Energy spring loaded and Accudisc probes.
- Custom probes available for semiconductor applications.
Made to Measure Support Every Step of the Way
We believe our customers should deal with an expert from the point of enquiry to project completion. Therefore, we will appoint you a product specialist, so you have continuity and a single point of contact. They will be your guide, help identify the best solution for your particular application and be with you through to successful implementation.
To speak to a product specialist and find out how a Luxtron® fiber optic thermometer could benefit your company, call +44 (0)1823 668633.
