The Luxtron® M-1100 from Advanced Energy is the latest FluorOptic® thermometry (FOT) converter platform featuring an advanced light source and improved ultralow noise electronics. Two new proprietary phosphor formulations VioLux and RubiLux have been developed to deliver 0.5⁰C accuracy, repeatability and stability over an extended range of -200 to 450⁰
Luxtron® M-1100
Fiber Optic Temperature Sensing for Semiconductor in Etch and Deposition Applications
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Typical Applications
Plasma Etch, Electrostatic chuck temperature
Plasma Etch, Dielectric window or chamber lid temperature
Microwave Heating
PEALD, PECVD Electrostatic chuck.
Luxtron® M-1100 Key Features
Wide supported temperature range
Low noise level with a fast response rate
5 channels in a single converter
Flexible communication outputs
EtherCAT Interface (optional)
Analog output
Benefits
Non-contact measurement to minimise the thermal offset
Easy to install
Achieve high accuracy and an extreme temperature control for different etching and wafer fab processes.
Made to Measure Support Every Step of the Way
We believe our customers should deal with an expert from the point of enquiry to project completion. Therefore, we will appoint you a product specialist, so you have continuity and a single point of contact. They will be your guide, help identify the best solution for your particular application and be with you through to successful implementation.
To speak to a product specialist and find out how a Luxtron® fiber optic thermometer could benefit your company, call +44 (0)1823 668633.
Key Specifications
| Measurement Range | -200 to 450 °C (-328 to 842 °F) |
| Accuracy | ± 0.5 °C, mix and match |
| Noise | ≤ 0.05 °C |
| Interface | ECAT, 4 to 20 mA or 0 to 10 V |
| Operating Temperature | 5 to 60 °C (41 to 140 °F) |
| System Storage (In Packaging) | -20 to 75 °C (-4 to 167 °F) |
| Channels | Up to 5 |
