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Luxtron® M-1000

Luxtron® M-1000

Fluoroptic Temperature Converter for Measurements Between -200 To 450 ⁰C (-328 To 842 ⁰F) in Semiconductor Applications.

Advanced Energy’s Luxtron® FluorOptic Temperature (FOT) Sensors use the principles of phosphorescence to deliver high-accuracy temperature monitoring for critical semiconductor applications such as plasma etch and plasma-enhanced deposition. The sensors are immune to interference from RF and microwave sources, enabling precise process control required to achieve device performance and yield for leading-edge semiconductor devices.

The Luxtron® M-1000 is the latest FOT converter platform, featuring an advanced light source and improved electronics for ultralow noise. In addition, two new proprietary phosphor formulations, VioLux™ and RubiLux™, have been developed to work in concert with the M-1000 to deliver sub 0.5 °C accuracy and excellent repeatability, and stability over an extended range -of 200 to 450 °C. This extended temperature range enables both cryogenic and high-temperature etch processes, both of which are critical for etching advanced high aspect ratio devices, such as 3D NAND.

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LUXTRON® M-1000 DATA SHEET

Applications

  • Plasma Etch, Electrostatic chuck temperature
  • Plasma Etch, Dielectric window or chamber lid temperature
  • Microwave Heating
  • PEALD, PECVD Electrostatic chuck

Luxtron® M-1000 Key Features

  • Custom OEM probe design and quick-turn prototypes from an experienced engineering team
  • Ability to have multiple probe types and temperature ranges on a single M1000
  • Sensors are immune to interference from RF and microwave sources
  • Option to separate the sensors from the probes for increased accuracy and repeatability.

Benefits

  • Wide supported temperature range
  • Low noise level with a fast response rate
  • Non-contact measurement to minimise the thermal offset
  • Easy to install into OEM equipment.

Made to Measure Support Every Step of the Way

We believe our customers should deal with an expert from the point of enquiry to project completion. Therefore, we will appoint you a product specialist, so you have continuity and a single point of contact. They will be your guide, help identify the best solution for your particular application and be with you through to successful implementation.

To speak to a product specialist and find out how a Luxtron® fiber optic thermometer could benefit your company, call +44 (0)1823 668633.

Key Specifications

Measurement Range -200 to 450 °C (-328 to 842 °F)
Accuracy ± 0.5 °C, mix and match
Noise ≤ 0.05 °C
Interface ECAT, 4 to 20 mA or 0 to 10 V
Converter Ambient Operating Temperature -10 to 60 °C (14 to 140 °F)
System Storage (In Packaging) -20 to 75 °C (-4 to 167 °F)
Channels Up to 5

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